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Chemical Mechanical Planarization technology empowering next generation astrophysics instruments

Completed TRL 1 (started at 1, targeting 1)

Description

Chemical Mechanical Planarization (CMP) is a new approach for fabricating large format, high yield, and high feature density detector arrays. We propose to develop CMP processes customized for materials significant for NASA detector technologies.

Benefits

1) Eliminate step coverage issues and thus significantly improve yield and reliability of microfabricated circuits

2) Enhance component density by facilitating multilayer circuits and thus large focal planes

Details

Technology areaSensors and Instruments > Remote Sensing Instruments and Sensors > Detectors and Focal Planes
ProgramCenter Independent Research & Development: GSFC IRAD (GSFC IRAD)
Lead organizationGoddard Space Flight Center, Greenbelt, MD
Start date2021-10-01
End date2022-09-30

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