Broadband Uncooled IR Detector Based On Nano-Electromechanical Systems (NEMS)

This Small Business Innovation Research Phase I project seeks to develop an innovative Nano-electromechanical systems (NEMS) based uncooled broadband detector (NEMS detector) with average with high quantum efficiency over the spectral range of 3µm – 50 µm and high detectivity. This device will have a broadband spectral range to support MWIR to Far IR imaging at high performance. The Phase II work will be continuation of Phase I work to include detector modeling, simulation and optimizations, sensing materials growth and optimization using a process compatible with CMOS process, process development, fabrication of test-structure, and their characterization. Further design optimization will be performed based on experimental and simulation results. In addition, design of detector array will also be carried out which will be scalable to large format array. The Phase II development of the NEMS detector will demonstrate a path toward to commercial development of the device as an uncooled broadband IR detector for NASA applications.

Earth Science missions, atmospheric science AIRS (3.7-14.5 µm), measures air temperature and humidity for weather forecasts, and TES (3.2-15.4 µm), measurements of tropospheric ozone from space. ASTER (8-14 µm), for solid earth and hydrology science, and HyspIRI Mission, Visible-Shortwave Infrared (VSWIR) Imaging Spectrometer and a Multispectral Thermal Infrared (TIR) Scanner. Sustainable Land Imaging – Technology (SLI-T) Landsat-9 Landsat-10 instruments, sensors, components, and measurement.

Military and homeland security include target detection for acquisition, tracking, and pointing of directed energy systems on next generation airborne platforms, intelligence, surveillance and reconnaissance platforms and remote sensing. Commercial applications include Spectroscopy and Instrumentation for Pharma, Forensic, Automobile, Medical, and Scientific Imaging, and Security segments.

This is early/mid-stage (TRL 4) — the most realistic path in is NASA SBIR/STTR, which funds small businesses and research institutions to develop technology aligned with NASA's needs (equity-free, phased funding). Check whether a current SBIR/STTR solicitation topic overlaps with this project's technology area, or contact the project directly (above) to ask.

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