Active Matrix Programmable Mirror

We propose a novel deformable mirror system with unprecedented capabilities: (1) small number of control channels – N channels to control, rather than the typical N2 channels, for an N x N array, (2) Low drive voltage – less than 20V, (3) high resolution stroke control – to 10 pm, (4) expandability to large arrays. We can accomplish these by utilizing technologies developed with tools and components used in the flat panel display industry, as well as our unique drive scheme that uses controlled charge rather than voltage for electrostatic actuation. The DM fabrication method will leverage heavily on Obsidian Sensors’ IMG (integrated MEMS on glass), which is a relatively high TRL technology.

Possible use cases exist for space based telescopes that require extreme levels of optical aberration correction for advanced imaging applications. For ground based imaging, atmospheric aberration correction can be enabled by DM. Please refer to the Phase II proposal for more in-depth discussion.

Ophthalmology, optical microscopy, optical coherence tomography, amateur astronomy, industrial lasers, advanced node lithography

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