Low Coherence Wavefront Probe for Nanometer Level Free-Form Metrology

The inability to accurately measure free form surfaces blocks the advancement of modern optics. The manufacturing tools to shape free form surfaces exist, the missing link are metrology tools to accurately measure and feedback to achieve the required accuracies. The low coherence wavefront Probe removes this barrier. Based on the unique and required non-contact, nanometer sensitivity sensor, the Probe measures ANY optical surface to slopes up to ±60° over a 360° azimuthal angle. NASA's SBIR Research Topic Focus Area S2.04 "X-Ray Mirror Systems Technology, Coating Technology for X-Ray-UV-OIR, and Free-Form Optics" continues to seek free form metrology capabilities. These two specifics areas X-Ray mirror system metrology and metrology of free form optics will have been met through this proposal. The Probe's accuracy and application depends on the metrology frame motion stages it is integrated with. The Probe when mounted on a NASA robotic CMM will simplify and speed assembling of complete mirror systems. Further the Probe when mounted on Precision or Ultra-Precision motion XYZ stages will enable the manufacture of free form optical surfaces, as well as X-Ray optics, with the metrology feedback missing until now. This CCRPP project matures the Probe technology into a product. It also develops metrology frames for Precision Free Form surface metrology and Ultra-Precision metrology as targeted by NASA for X-Ray mirrors.

Ultra precision surface profiles of free form X-Ray mirrors ~2 nm RMS uncertainty Measuring the distance and position of optical components during the integration and testing phase of space flight instruments High precision free form and steep asphere measurement impossible with interferometers Quick non-contact receiving inspection of the optical components to optical tolerances, a unique universal optical surface metrology tool.

Ultra precision surface profiles of free form X-Ray mirrors ~2 nm RMS uncertainty Non-contact, high slope free form and aspheres measurement ~50 nm uncertainty in less than 2 minutes Measure millimeter to several meter sized optics by integrating the probe on various sized XYZ motion stage systems. Flats to free forms and all shapes in-between.

This is a mature technology (TRL 8) — the realistic path in is usually NASA's Technology Transfer Program: licensing an existing NASA patent, or a Space Act Agreement to use NASA facilities/expertise directly. NASA also runs a startup licensing program with no upfront fee for companies formed to commercialize a specific NASA technology.

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