Low-cost Ultra-high Precision X-Ray Mirror Surface Deterministic Finishing

A-Z Innovative Solutions proposes to develop a computer- numerical-controlled deterministic polishing machine specialized for X-ray mirror surface finishing. The proposed new technique is particularly suiting for large cylindrical X-ray mirrors (between 100 and 1,000 mm in height, 50 to 5000 mm in diameter, varying radial prescription along azimuth, ~2 mm in thickness) for NASA’s space X-ray observer by introducing the substrate X-direction step-rotating scan mechanism. By incorporating chemical reactive removal mechanism, this new tool will drastically speed up the deterministic process with much better surface smoothness finishing quality. In this program, we anticipate to achieve: Ultra-high precision surface finishing capability of 0.1 arcsec half-power diameter (HPD) with RMS < 0.6 nm Radial slope error <0.1 urad Shape error out-of-round < 0.4µm for X-ray cylindrical mirrors 5 to 10 times better surface smoothness (0.1 nm RMS) is expected over the present deterministic techniques With the innovative removal mechanism, 5 to 10 times better surface smoothness is expected over the present deterministic techniques as the chemical reactive removal is at the atomic level, rather than to knock off material as aggregates of molecules by bombardment from FJP, MRF and Ion-Beam Figuring flows. High-speed for use on large areas and cost effective

The proposed CNC deterministic polishing techniques will significantly improve the X-Ray mirror surface figure accuracy to 0.1 arcsec half-power diameter with RMS < 0.6 nm while the current technology can yield 2.5 arcsec HPD on the outside of a mandrel used for replicating shells. The new technology will bring the previous difficult ultra-high precision X-Ray mirror fabrication and impossible arbitrary surface shape/pattern generation into a routine job. This will greatly benefit NASA astronomy telescope optical parts fabrication.

The proposed system will be general optical surface finishing system. It will bring the optical fabrication to a new era with ultra-high precision, arbitrary shape generation and ultra-high surface smoothness.

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