Silicon Carbide Grid Fabrication and Vibration Qualification

SiC grids address identified risks for the Lynx X-ray Microcalorimeter (LXM) and the Athena X-IFU, such as fragility and excessive power usage. Single crystal SiC grids are a natural extension of single crystal Si for integration into NASA filter grids. SiC has the highest thermal conductivity of all materials besides diamond. Phase I measurements showed SiC grids to be 5X stronger than commercial Si grids. We will fabricate prototype SiC X-IFU and LXM microcalorimeter grids with improved temperature uniformity and strength, addressing identified risks for these instruments. We will also improve EMI shielding and develop a method to create custom outer diameters. Each grid will be strength-proofed to ensure design conformance. Full-sized filters incorporating these grids will be durability tested to advance the TRL of SiC grids for NASA missions. All the Phase I objectives were met, with the following results: -An 88mm X-IFU TF4 grid fabricated from a 150mm SiC wafer -Measurements showing high SiC grid strength -Vibration of two 35mm grids to NASA GEVS, one with an attached 80nm membrane -Demonstration of 3:1 grid bar aspect ratio in small grids -A breakout tab method for producing custom outer frame diameters -A test of grid metallization for improved EMI shielding Phase II objectives are to: -Deliver X-IFU TF5 100mm SiC grids with improved temperature uniformity -Deliver 2-Level LXM DMS 128mm SiC grids with improved durability -Vibration test X-IFU 100mm and LXM 2-Level 128mm grids with attached membranes - Develop a durable aluminum coating to increase EMI shielding -Increasing grid bar aspect ratio and reducing minimum grid bar width for 128mm apertures Achieving these objectives will yield a functional spacecraft grid technology providing unparalleled transmittance, strength and temperature uniformity, while meeting EMI requirements. The objectives advance grid TRL to a level sufficient for consideration by many NASA missions.

X-ray Microcalorimeter Filters, Optical Blocking Filters, Contamination Blocking Filters, EUV Foil Supports, Solar Telescope Entrance Shields, Charged Particle Detector Grids, Ion Drive Grids, High Temperature Transducers, Far Infrared Bandpass Filters, Long-wave Blocking Filters, Quantum Efficiency Enhancement Grids, X-ray Filter Wheel Components, Neutral Atom Detector Grids

Gridded X-ray pressure windows, charged particle beam grids, EMI shielding grids, high bandwidth instrumented X-ray windows, X-ray and EUV foil supports, infrared shielding grids for semiconductor EUV equipment, beryllium-alternative X-ray windows, MEMS components, high strength ceramic components, X-ray laser and synchrotron optical components, high energy plasma containment, ion gun grids

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