A Physics-Based Approach to Solving the Near Angle Scatter Dilemma (FRTS)

We propose a new physics based scatter model, which has the ability to predict Near Angle Scatter phenomena - mission critical for future flagship missions such as the Habitable Worlds Observatory (HWO) for seeing exoplanets. We intend to implement a software test-bench to compare measured Bidirectional Reflectance Distribution Function (BRDF) from the Solar UltraViolet Imager (SUVI) telescope to predicted results from the model. Additionally we will extend the proposed model to include higher order effects, such as secondary scatter. This new model has the ability to model any scattering surface and is derivated from first principles, and thus important for modeling Extreme UltraViolet (EUV) lithography optics and extremely smooth optics.

NASA identifies Near Angle Scatter Phenomena as mission critical. Our innovation predicts and quantifies Near Angle Scatter phenomena - essential for the strategic planning and successful execution of the Habitable Worlds Observatory (HWO) mission. This technology would allow for advanced analysis of telescope mirrors and systems to ensure top performance, as well as model performance degradation due to micrometeoroid impacts - which affect instrumentation and satellites in orbit. The innovation allows for prediction of scatter for surfaces for next generation lithography systems for next generation of EUV lithography and semiconductors. This will accelerate progress in Hyper-NA EUV tooling development. Additionally this can be applicable for quantifying scatter for extremely smooth surfaces used for defense applications.

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