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Surface Micromachined Arrays of Transition-Edge Detectors, Phase I

Completed

Description

An innovative surface micromachining technique is described for the fabrication of closely-packed arrays of transition edge sensor (TES) x-ray microcalorimeters. This technique enables individual TES microcalorimeters to be suspended on a thin membrane for thermal isolation from the bath temperature. The TES detectors are fabricated from normal metal/superconductor bilayers with a transition temperature of around 0.1 K. The proposed surface micromachining technique will simplify the fabrication of closely-packed TES microcalorimeter arrays, which are needed for numerous applications in astronomical x-ray spectroscopy.

Details

Technology areaSensors and Instruments > Remote Sensing Instruments and Sensors > Detectors and Focal Planes
ProgramSmall Business Innovation Research/Small Business Tech Transfer (SBIR/STTR)
Lead organizationGoddard Space Flight Center, Greenbelt, MD
Start date2004-01-16
End date2004-07-19

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