← Back to NASA Technology Projects
High Quality, Low-Scatter SiC Optics Suitable for Space-based UV & EUV Applications, Phase II
Completed
Description
SSG Precision Optronics proposes the development and demonstration of a new optical fabrication process for the production of EUV quality Silicon Carbide (SiC) optics. The process combines three technologies to provide a cost and schedule effective solution for lightweight, thermally stable precision optics for EUV applications. First, near-net-shape cast SiC materials for monolithic lightweighted, SiC mirror substrates with minimal machining required. Second, a thin CVD SiC sputter deposition process applied to the mirror facesheet. This enables a low-scatter surface as well as high reflectance in the EUV band. Third, the application of Tinsley?s computer controlled optical surfacing (CCOS) grinding and polishing makes it possible to generate aspheres with extremely accurate surfaces. The manufacturing process proposed allows production of state-of-the-art SiC aspheric mirrors with numerous benefits compared to competing technologies and traditional processes: ?Excellent Surface Figure Accuracy (<0.01 waves RMS, over low and mid-spatial-frequency measurements); ?Ultra-low micro-roughness (<10 Angstroms RMS routine, <1 Angstrom RMS achievable); ?Improved yield; ?Very low areal densities (~10 kg/m2 at an aperture of 1 meter); ?Superior thermal stability (SiC bulk material properties); In Phase 2, SSGPO will demonstrate an optimized optical fabrication process by producing a SiC EUV flight-ready optic.
Details
| Technology area | Thermal Management Systems > Thermal Control Components and Systems > Measurement and Control |
| Program | Small Business Innovation Research/Small Business Tech Transfer (SBIR/STTR) |
| Lead organization | Goddard Space Flight Center, Greenbelt, MD |
| Start date | 2003-12-08 |
| End date | 2005-11-30 |
Project contacts
Listed on TechPort itself — the most direct way to ask about this specific project.
How to get involved
This is a mature technology (TRL 7+) — the realistic path in is usually NASA's Technology Transfer Program: licensing an existing NASA patent, or a Space Act Agreement to use NASA facilities/expertise directly. NASA also runs a startup licensing program with no upfront fee for companies formed to commercialize a specific NASA technology.
None of these are guaranteed paths for this specific project — TechPort itself doesn't have an "apply" button. Reaching out to the contact(s) above with a specific question is usually the fastest way to find out what's actually open.