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Cryogenic MEMS Pressure Sensor, Phase I
Completed
Description
A directly immersible cryogenic MEMS pressure sensor will be developed. Each silicon die will contain a vacuum-reference and a tent-like membrane. Offsetting thermal effects allow the device to operate over a wide temperature range. Using a patented, proven design the device is capable of continuous low-power operation and provides accuracies as low as 0.002 % of reading.
Details
| Technology area | Sensors and Instruments > Remote Sensing Instruments and Sensors > Cryogenic/Thermal Systems |
| Program | Small Business Innovation Research/Small Business Tech Transfer (SBIR/STTR) |
| Lead organization | Glenn Research Center, Cleveland, OH |
| Start date | 2009-01-22 |
| End date | 2009-07-22 |
How to get involved
This is a mature technology (TRL 7+) — the realistic path in is usually NASA's Technology Transfer Program: licensing an existing NASA patent, or a Space Act Agreement to use NASA facilities/expertise directly. NASA also runs a startup licensing program with no upfront fee for companies formed to commercialize a specific NASA technology.
None of these are guaranteed paths for this specific project — TechPort itself doesn't have an "apply" button. Reaching out to the contact(s) above with a specific question is usually the fastest way to find out what's actually open.