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Completed TRL 2 (started at 2, targeting 4)
The proposed project is to develop a high performance drive electronics circuit for MEMS Pirani pressure gauges. The proposed drive electronics circuit will be developed based on the constant voltage principle for high performance pressure measurements that enables real-time in-situ measurements without a need for precise tuning of its frequency response. The constant voltage operation will provide a constant bandwidth control, higher signal-to-noise ratio, guaranteed circuit stability regardless of gauge cable length and longer cable length without affecting the frequency response.
The objective of this project is to develop a high performance drive electronics circuit for MEMS Pirani pressure gauges. The proposed drive electronics circuit will be developed based on the constant voltage principle for high performance pressure measurements that enables real-time in-situ measurements. The constant voltage approach provides many benefits over the conventional approach.
The ultimate application of the proposed MEMS Pirani pressure gauge with the drive electronics is for instrument control and response time improvement.
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